FILM CLEANING METHOD AND FILM CLEANING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a film cleaning method which can sufficiently remove foreign matter while reducing a load on a film. SOLUTION: The film cleaning method includes: an unwinding stage where a web film W wound so as to be a roll shape is unwound; a first cleaning stage where the web film W unwound by the unwinding stage is subjected to liquid cleaning with supersonic waves; a second cleaning stage where the web film W after the first cleaning stage is subjected to liquid cleaning with supersonic waves having a frequency higher than the frequency set in the first cleaning stage; a drying stage where the cleaned web film W is dried; and a winding stage where the dried web film W is wound so as to be a roll shape. COPYRIGHT: (C)2010,JPO&INPIT