发明名称 BEAM SPECTROMETER
摘要 PURPOSE: A spectrum analyzer is provided to minimize measurement error and reduce the time of analysis. CONSTITUTION: A spectrum analyzer comprises a beam source(10), a beam dispersion unit(101), and first and second beam splitters(105a,105b). The spectrum analyzer more comprises first and second reflective mirrors(106a,106b) and an optical detector(103). The beam source emits the beam mixed with several wavelength components on a measurement object(12). The beam dispersion unit disperses the beam branched form the beam source with spectrum and emits the beam through a slit(S3). The first beam splitter divides the dispersed beam into a measurement beam and a reference beam. The second beam splitter induces the measurement beam and the reference beam passed through objects to the same paths. The beam dispersion part has a grating portion fixed within the beam dispersion part. The first reflective mirror reflects the measurement beam to the second beam splitter. The second reflective mirror reflects the reference beam to the second beam splitter.
申请公布号 KR20090118367(A) 申请公布日期 2009.11.18
申请号 KR20080044109 申请日期 2008.05.13
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE, CHANG YUN;KIM BAE KYUN;HONG, SANG SU;KIM, TAK GYUM
分类号 G01J3/02;G01J3/12 主分类号 G01J3/02
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