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发明名称
Vapor deposition apparataus having nozzle heating mechanism
摘要
申请公布号
KR100903098(B1)
申请公布日期
2009.06.16
申请号
KR20030022569
申请日期
2003.04.10
申请人
发明人
分类号
H05B33/10;(IPC1-7):H05B33/10
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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