| 主权项 |
1. A laser beam spot shape detecting method of detecting the spot shape of a laser beam oscillated by laser beam oscillating means and focused by focusing means, said laser beam spot shape detecting method comprising:
a detection substrate holding step of holding a detection substrate on a holding surface of a table movable in an X direction and a Y direction, said detection substrate having a photoluminescent substance formed from a minute particle capable of emitting light by the application of said laser beam thereto; a laser beam applying step of applying said laser beam oscillated by said laser beam oscillating means and focused by said focusing means to an area of said detection substrate held on said table where said photoluminescent substance is located, said laser beam having a predetermined power that cannot process said detection substrate and said photoluminescent substance, the size of a spot of said laser beam on said detection substrate being larger than the size of said photoluminescent substance; a light intensity detecting step of moving said table in said X direction and said Y direction relatively to said focusing means in the condition where said laser beam is applied to the area of said detection substrate held on said table where said photoluminescent substance is located and detecting the intensity of light emitted from said photoluminescent substance by using a photodetector during the movement of said table; a light intensity map preparing step of preparing a light intensity map indicating the light intensities detected in said light intensity detecting step at all of the X and Y coordinates of said photoluminescent substance; a spot shape image forming step of forming spot shape images of said laser beam according to a plurality of light intensity maps obtained by positioning said focusing means at a plurality of detection positions changed in a Z direction perpendicular to said holding surface of said table and performing said light intensity detecting step and said light intensity map preparing step at said plurality of detection positions, and a spot contour determining step of focusing the laser beam at a selected first one of the spots in a plurality of detection positions from which the size of the first spot and a first focal length of the focusing means can be obtained, focusing the laser beam at at least one second selected spot at a second focal length higher than the first focal length, and focusing the laser beam at at least one third selected spot at a third focal length lower than the first focal length, wherein during said light intensity detecting step, moving said table to cause the movement of said photoluminescent substance from an area where the spot of said laser beam is absent through an area where the spot is present to an area where the spot is absent. |
