| 摘要 |
PURPOSE: A chemical supply device is provided to remove the hydroplaning on a surface of a mesh net by including an air vent pipe in the mesh net. CONSTITUTION: A chemical supply device includes a chemical tank(20), a chemical supply pump(30), a process bath(13), and a mesh net. The chemical tank stores the chemical. The chemical supply pump supplies the chemical from the chemical tank to the substrate processing unit. The process bath receives the chemical sprayed in the substrate processing unit and recovers the chemical in the chemical tank. The mesh net is installed between the exhaust pipe connected to the lower side of the process bath and the chemical tank. An air vent pipe is installed in the mesh net to remove the hydroplaning on the surface of the mesh net.
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