| 摘要 |
<p>PURPOSE: An apparatus for conveying a substrate is provided to improve a failure of delivering a torque of eccentricity by transmitting the torque of a moving shaft. CONSTITUTION: In an apparatus for conveying a substrate, the feed shaft(110) is inside a chamber(100a) and transfers a substrate. A first pulley(120) is connected to the feed shaft while having more than one first magnet of a disc-shaped. An axis of rotation(130) is rotated by the torque from a driving part. A second pulley(140) delivers the torque to the first pulley by using the magnetic force between the second magnet and the first magnet. A sliding member(150) maintains an interval between the chamber and the second pulley. A retainer is installed in the single-side of the second pulley and accommodates the sliding member.</p> |
