| 摘要 |
PROBLEM TO BE SOLVED: To provide an organometallic-compound feeder capable of supplying an organometallic compound which is solid at ordinary temperature, with a stable concentration to raise a use rate of the packed organometallic compound. SOLUTION: The organometallic-compound feeder includes: a holding plate (9) which has been disposed in a lower part of a container (1) and holds an organometallic compound (8) deposited on an inert support and permits carrier gas to pass therethrough; a carrier gas inlet (4) disposed in an upper part of the container; a carrier gas outlet (5) which is open in an area located in a bottom part of the container and under the holding plate; and a baffle (10) which has been attached between the holding plate (9) and the carrier gas outlet (5) and is larger than the aperture of the carrier gas outlet (5). The feeder is configured so that the carrier gas passes downward from above through the organometallic compound packed on the holding plate and deposited on the inert support. COPYRIGHT: (C)2010,JPO&INPIT
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