PLASMA PROCESSING APPARATUS, POWER SUPPLY APPARATUS AND METHOD FOR USING PLASMA PROCESSING APPARATUS

摘要

[PROBLEMS] To provide a microwave transmission line which uses a coaxial tube. [MEANS FOR SOLVING PROBLEMS] A plasma processing apparatus (10) splits a microwave, which is transmitted to a coaxial tube (600) from a microwave source (900) through a splitting waveguide tube (905), by a splitting plate (610) into a plurality of microwaves and transmits the microwaves to internal conductors (315a) of the coaxial tubes. The microwaves transmitted through the internal conductors (315a) of the coaxial tubes are outputted into a processing container (100) from dielectric plates (305) connected to the internal conductors (315a). Processing gas introduced into the processing container (100) is excited by the outputted microwaves, and desired plasma processing is performed to a substrate (G). The plasma processing apparatus has high expandability to cope with area increase by using the plurality of dielectric plates (305), and furthermore, both compact design of the transmission line and low frequency microwave supply can be achieved by using the coaxial tube for the transmission line.