METHOD OF FORMING FILM AND APPARATUS FOR FILM FORMATION,申请号EP20060768005-传众专利搜索

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发明名称	METHOD OF FORMING FILM AND APPARATUS FOR FILM FORMATION
摘要
申请公布号	EP1918417(A4)	申请公布日期	2009.11.11
申请号	EP20060768005	申请日期	2006.07.07
申请人	TOKYO ELECTRON LIMITED (TEL)	发明人	NAKAMURA, KAZUHITO;YAMASAKI, HIDEAKI;KAWANO, YUMIKO
分类号	C23C16/42;C23C16/455;C23C16/46;H01L21/285	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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