发明名称 |
APPLICATION APPARATUS |
摘要 |
PURPOSE: An application apparatus is provided to improve uniformity of the transfer amount of coating solution coated on a substrate, thereby forming a thin film with high uniformity of film thickness. CONSTITUTION: An application apparatus(1) comprises a table for loading a substrate(P) on the upper side; a cylinder(11); a printing plate(12) which is installed by winding the outer circumference of the cylinder and with unevenness of dot shape for maintaining the coating solution on the convex patterns; a coating solution supply unit(20); and a relative movement unit of the table and the cylinder while rotating the cylinder around a shaft center. |
申请公布号 |
KR20090116643(A) |
申请公布日期 |
2009.11.11 |
申请号 |
KR20090039165 |
申请日期 |
2009.05.06 |
申请人 |
DAI NIPPON SCREEN MFG. CO., LTD.;KOMURA TECH CO., LTD. |
发明人 |
TAKEICHI YOSHIKUNI;SAITSU TAKEHIKO;KITAZAWA HIROYUKI;NISHIYAMA SATORU;URANO MASAAKI |
分类号 |
B05C5/02;B05C1/08;B05C9/00 |
主分类号 |
B05C5/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|