发明名称 LASER MACHINING DEVICE AND LASER MACHINING MASK AND PRODUCTION METHOD THEREFOR
摘要 <p>A mask 10 comprises a mask member layer 12 having a laser processing pattern and comprising a metallic material and first and second substrate members 11 and 13 holding the mask member on two faces thereof and comprising a material that transmits laser light. <IMAGE></p>
申请公布号 EP1262271(A4) 申请公布日期 2009.11.11
申请号 EP20010900631 申请日期 2001.01.09
申请人 SUMITOMO HEAVY INDUSTRIES, LTD. 发明人 HAMADA, SHIRO
分类号 B23K26/06;G02B27/09 主分类号 B23K26/06
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