发明名称 Method for containing a device and a corresponding device
摘要 A method of enclosing a micromechanical element formed between a base layer and one or more metallization layers includes forming one or more encapsulating layers over the micromechanical element and providing an encapsulating wall surrounding the element extending between the base layer and the one or more encapsulating layers. An electrical connection is provided between the base layers and the one or more metallization layers formed above the micromechanical element.
申请公布号 US7615395(B2) 申请公布日期 2009.11.10
申请号 US20060474490 申请日期 2006.06.26
申请人 CAVENDISH KINETICS LIMITED 发明人 HEUVELMAN WILLEM MATTHIJS
分类号 H01L21/00;B81B3/00;B81B7/00;B81C1/00;H01L23/525 主分类号 H01L21/00
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