APPARATUS AND METHOD FOR PERFORMING SECONDARY ION MASS SPECTROSCOPY

摘要

An apparatus and method for performing Secondary Ion Mass Spectroscopy (SIMS) analysis of a sample are disclosed. The apparatus and method include a gas field ion source as the source of a first ion beam directed to a sample to sputter particles, which are optionally ionized by a laser beam and accelerated in a secondary ion beam towards a mass spectrometer. This apparatus and method allow obtaining SIMS characterization with a lateral resolution less than about 1nm.