MICROPHONE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a miniaturized microphone.

SOLUTION: The microphone includes: a substrate 2 having a sound hole 1 formed thereon and a substrate electrode 10 on the upper surface; a conversion body 3 having a main body 5 provided on the upper surface of the substrate 2 and having a rear surface space 6 formed thereon, a diaphragm 7 provided on the bottom of the rear surface space 6 of the main body 5 and a conversion body electrode 8 provided on a region opposite to the substrate electrode 10 in the lower surface of the main body 5; and bumps 11 for connecting the substrate electrode 10 to the conversion body electrode 8. The diaphragm 7 vibrates in response to a sound entering through the sound hole 1 and the sound is converted into a signal in the conversion body 3.

COPYRIGHT: (C)2010,JPO&INPIT