| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron microscope observation sample supporting member which, when a finer sample piece is extracted from a sample to process it as an electron microscope observation sample in FIB processing, an FIB processing ion beam is not emitted on the electron microscope observation sample supporting member for fixing the fine sample piece to prevent the occurrence of redeposition on the sample. Ž<P>SOLUTION: Because a flake fixing portion 5 is sufficiently thinner than the fine sample piece 2, processing without cutting the flake fixing portion 5 is possible even if an ion beam 6 is tilted to fall to an electron microscope observation sample portion at the center of the fine sample piece 2. This prevents the production of fine powder from the flake fixing portion 5, so that no redeposition occurs on the observation sample. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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