ELECTROSTATIC ACTUATOR, LIQUID DROPLET JETTING HEAD, MANUFACTURING METHOD OF ELECTROSTATIC ACTUATOR, AND LIQUID DROPLET JETTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic actuator etc. capable of achieving improved driving durability and reliability with a simple constitution. SOLUTION: The electrostatic actuator includes: individual electrodes 5 formed on an electrode substrate 3; and diaphragms 6 disposed facing the individual electrodes 5 with a prescribed gap therebetween, wherein electrostatic force is generated between the individual electrode 5 and the diaphragm 6 so as to generate displacement in the diaphragm 6. The individual electrode 5 is composed of a conductive amorphous carbon based thin film. COPYRIGHT: (C)2010,JPO&INPIT