CLEANING DEVICE, CLEANING METHOD AND OBJECT TO BE CLEANED

摘要

PROBLEM TO BE SOLVED: To provide a compact high-operability cleaning device in which the cleaning effect of a fine bubble cleaning method is more enhanced and the service life of a cleaning liquid is prolonged. SOLUTION: The cleaning device comprises: a cleaning tank 21 storing a cleaning liquid into which an object to be cleaned is immersed; a cleaning nozzle by which fine bubbles are generated in the cleaning liquid, and the object is cleaned; an air blowing part 26 blowing air to the curved surface 33 at the upper part of the cleaning tank 21; and an overflow tank 27 into which oil floated up on the face of the cleaning liquid is driven out by the air at the air blowing part 26. COPYRIGHT: (C)2010,JPO&INPIT