| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable individual VCSELs to be easily wired independently and reduce thermal interference between the VCSELs, even when the VCSELs are highly integrated. Ž<P>SOLUTION: A two-dimensional surface-emitting laser array is constituted of an active layer formed on a semiconductor substrate, a spacer layer formed sandwiching the active layer, a first and second reflective mirrors formed sandwiching the active layer and the spacer, a first electrode formed on the first reflective mirror, and a second electrode formed on the back of the semiconductor substrate. Each of the surface-emitting lasers is independently controlled, even in a case that a plurality of surface-emitting lasers are formed on one semiconductor substrate by forming a mesa structure by processing the first reflective mirror, the spacer layer and the active layer, and the first electrode on the mesa structure. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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