| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processor, a substrate processing method, a program and a recording medium, capable of suppressing a trouble that it becomes impossible to simultaneously use a plurality of heaters or all the heaters in a heating part, and capable of preventing occurrence of disconnection in the heaters when the substrate processor is used for a long period. Ž<P>SOLUTION: A control part 50 provided in the substrate processor 1 controls ON/OFF of each heater 24a, respectively, so as to alternately turn each heater 24a in the heating part 24 ON for preset heater ON time in each heating period. The control part 50 calculates an operation amount within a range of 0 to 1 by performing feedback control so that temperature of processing liquid may be maintained at preset prescribed temperature, and calculates a period of a heating period by dividing the heating on time by the operation amount. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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