| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acoustic emission signal detection device capable of high-sensitivity detection, a thin-film peel strength measuring device, and an acoustic emission signal detection method. Ž<P>SOLUTION: This acoustic emission signal detection device for detecting the acoustic emission signal generated from a sample 21 has a case 31 for storing the sample 21 inside, a pair of electrodes 12, 13, and a piezoelectric body 11 provided between the pair of electrodes. The device is equipped inside the case with: a piezoelectric element 10 which is to come into contact with the sample 21; and an output terminal 32 connected to one electrode 12 of the piezoelectric element 10, for extracting the detection signal of the piezoelectric element 10. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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