| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for simultaneously inspecting a plurality of discharge holes provided and opened in a spinneret, detecting foreign matters within a plurality of the discharge holes at once without detecting the presence of the residual foreign matters within the holes one by one, and surely inspecting the foreign matters within the holes in a short period of time without requiring a long time. SOLUTION: In the inspection apparatus and the inspection method of foreign matters within the holes of the spinneret, a plurality of image data groups are obtained at a high resolution by using a scan camera and scanning the spinneret, and are combined. The presence of the foreign matters within the holes is detected at once from the created combined image data in a plurality of the respective discharge hole groups provided and opened in the spinneret by using image processing. COPYRIGHT: (C)2010,JPO&INPIT
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