| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic filter provided with a ceramic porous film which has a few defects, a thin film thickness and a high resolution. SOLUTION: On a titania UF film 14 which is an ultrafiltration film (UF film) whose average pore diameter is 2 to 20 nm and the film thickness is 0.1 to 1.0 μm formed on a porous base material 11 which is a microfiltration film (MF film), a silica film 1 which is the ceramic porous film a part of which is infiltrated into the micro pore of the titania UF film 14 and into the micro pore of the titania UF film 14 and the porous base material 11 is formed. COPYRIGHT: (C)2010,JPO&INPIT |
