METHOD AND APPARATUS FOR FABRICATING OPTOELECTROMECHANICAL DEVICES BY STRUCTURAL TRANSFER USING RE-USABLE SUBSTRATE
摘要
One embodiment of the present invention provides a process for fabricating multiple devices on a single substrate based on a structure transfer process. During operation, the process starts by forming structures of multiple devices on a first substrate. The process then bonds the structures of the multiple devices onto a second substrate. Next, the process transfers the multiple devices from the first substrate onto the second substrate by fracturing the structures of the multiple devices off the first substrate, wherein the transferred devices preserve physical orientation and material properties of the said fabricated structures.
申请公布号
WO2009135078(A2)
申请公布日期
2009.11.05
申请号
WO2009US42431
申请日期
2009.04.30
申请人
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;JAYARAMAN, LOGEESWARAN, VEERAYAH;KATZENMEYER, AARON, M.;ISLAM, M., SAIF
发明人
JAYARAMAN, LOGEESWARAN, VEERAYAH;KATZENMEYER, AARON, M.;ISLAM, M., SAIF