发明名称 Apparatus and method for coating of a web in vacuum by twisting and guiding the web multiple times along a roller past a processing region
摘要 <p>A guiding device for guiding a flexible substrate entering the guiding device along a first direction is described. The guiding device includes a vacuum chamber, a first roller (134) within the vacuum chamber and having an axis being inclined with respect to a direction perpendicular to the first direction for introducing a displacement from the first direction, and a second roller (132) within the vacuum chamber and having an axis being inclined with respect to a direction perpendicular to the first direction for guiding the flexible substrate two or more times in a web guiding region substantially parallel to itself, wherein the flexible substrate trespasses the web guiding region two or more times along the same surface.</p>
申请公布号 EP2113585(A1) 申请公布日期 2009.11.04
申请号 EP20080155400 申请日期 2008.04.29
申请人 APPLIED MATERIALS, INC. 发明人 HEIN, STEFAN;SAUER, PETER;WHITE, JOHN
分类号 C23C14/56;C23C16/54 主分类号 C23C14/56
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