发明名称 |
Apparatus and method for coating of a web in vacuum by twisting and guiding the web multiple times along a roller past a processing region |
摘要 |
<p>A guiding device for guiding a flexible substrate entering the guiding device along a first direction is described. The guiding device includes a vacuum chamber, a first roller (134) within the vacuum chamber and having an axis being inclined with respect to a direction perpendicular to the first direction for introducing a displacement from the first direction, and a second roller (132) within the vacuum chamber and having an axis being inclined with respect to a direction perpendicular to the first direction for guiding the flexible substrate two or more times in a web guiding region substantially parallel to itself, wherein the flexible substrate trespasses the web guiding region two or more times along the same surface.</p> |
申请公布号 |
EP2113585(A1) |
申请公布日期 |
2009.11.04 |
申请号 |
EP20080155400 |
申请日期 |
2008.04.29 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
HEIN, STEFAN;SAUER, PETER;WHITE, JOHN |
分类号 |
C23C14/56;C23C16/54 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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