| 摘要 |
PROBLEM TO BE SOLVED: To provide a small, light-weight and highly sensitive micro pressure detection element. SOLUTION: A tunnel magnetoresistance effect element (TMR element) 2 formed by arranging a magnetostrictive part 6 in a part of a magnetic member and using a thin-film technology and the like is provided in a sensor part 7, and through a change and the like of a reluctivity based on magnetostriction of the magnetostrictive part 6, a pressure change in a detection object is detected. In this way, the highly sensitive micro pressure-detection element 1 can be realized while reducing its size and weight. |
