| 摘要 |
PROBLEM TO BE SOLVED: To provide a cover opening latch mechanism for a container for precise substrates to perform locking and opening of a case and a cover with a sufficient sealing strength kept, facilitate cleaning of a latch plate, prevent the generation of a contaminated material in the container, and be connectable to a device having an SMIF or a FIMS. SOLUTION: This cover opening latch mechanism 1 comprises a pair of rotary cams 5 to which access from the external part of a cover is practicable and which are arranged at the internal part of the cover; a plurality of latch plates 6a, 6b, and 6c movably arranged with the latch plate engaged with the rotary cam 5 and provided at their tip parts with lock claws 7a, 7b, and 7c locked in respective recessed parts for locking of a cover case. Each of the latch plates comprises first and second latch plates movable in the directions of the upper and lower sides of the opening part of a container arranged with the rotary cam 5 nipped therebetween; and a third latch plate movable in the direction of a left or a right side situated orthogonally thereto. |
