Laser irradiation method, laser irradiation apparatus and method for manufacturing crystalline semiconductor film

摘要

A laser irradiation apparatus comprising: a first combined cylindrical lens array in which convex cylindrical lenses and concave cylindrical lenses are arranged alternately in a direction of curvature; and a second combined cylindrical lens array in which convex cylindrical lenses and concave cylindrical lenses are arranged alternately in a direction of curvature, wherein the first combined cylindrical lens array and the second combined cylindrical lens array are in contact with each other.