| 摘要 |
PURPOSE: A substrate transferring device is provided to reduce the consumed amount of a developer by collecting it within a shorter time although the developer is removed as naturally falling from a substrate. CONSTITUTION: The first transfer unit(1) transfers a substrate. The second transfer unit(3) is arranged separately from the first transfer unit as much as a predetermined distance. The third transfer unit(5) connects the first and second transfer units. The height of the third transfer unit is bigger than a side centering the direction in which the substrate is moved. A tilt adjusting part controls the tilt angle of the third transfer module. The first and second transfer units have a driving source and a plurality of transfer rollers. The transfer rollers are rotated by the driving source and are arranged at regular intervals. |
