发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND METHOD FOR PREPARING HEAT-RESISTANT RESIN FILM
摘要 The present invention is directed to a photosensitive resin composition comprising (a) a resin having a specific structure, (b) a photosensitive agent, and (c) an organic solvent having a boiling point at atmospheric pressure of 100 DEG C or higher and 140 DEG C or lower, the content of the component (c) being 50% by weight or more and 100% by weight or less based on the total amount of the organic solvent, and to a process for producing a heat-resistant resin film using the same. According to the present invention, there is provided a photosensitive resin composition which is less likely to cause defects such as transcribed trace and line drawing. <IMAGE>
申请公布号 EP1508837(A4) 申请公布日期 2009.11.04
申请号 EP20030733112 申请日期 2003.05.28
申请人 TORAY INDUSTRIES, INC. 发明人 MIYOSHI, KAZUTO;OKUDA, RYOJI;TOMIKAWA, MASAO
分类号 G03F7/037;G03F7/004;G03F7/022;G03F7/023;H01L27/32;H01L51/52;H05B33/10;H05B33/14 主分类号 G03F7/037
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