发明名称 COMPOUND SEMICONDUCTOR LAMINATE, PROCESS FOR PRODUCING THE COMPOUND SEMICONDUCTOR LAMINATE, AND SEMICONDUCTOR DEVICE
摘要 <p>This invention provides a compound semiconductor laminate, which can realize the formation of an InSb film on an Si substrate and can realize the application and development on a commercial scale to magnetic sensors such as hall elements and magnet resistance elements, optical devices such as infrared sensors, and electronic devices such as transistors, and a process for producing the compound semiconductor laminate. An active layer (2), which is an As-free compound semiconductor, is provided directly on the Si substrate (1). As is present in the interface of the active layer (2) and a single crystal layer of the Si substrate (1). The compound semiconductor contains at least nitrogen. The compound semiconductor is a thin film of a single crystal. The Si substrate (1) is a bulk single crystal substrate or a thin-film substrate of which the uppermost layer is formed of Si.</p>
申请公布号 KR20090115215(A) 申请公布日期 2009.11.04
申请号 KR20097019644 申请日期 2008.03.21
申请人 ASAHI KASEI MICRODEVICES CORPORATION 发明人 SHIBATA YOSHIHIKO;MIYAHARA MASATOSHI
分类号 C30B23/08;C30B29/40 主分类号 C30B23/08
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