发明名称 |
Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field |
摘要 |
System for controlling crystal growth in a Czochralski crystal growing apparatus. A magnetic field is applied within the crystal growing apparatus and varied to control a shape of the melt-solid interface where the ingot is being pulled from the melt. The shape of the melt-solid interface is formed to a desired shape in response to the varied magnetic field as a function of a length of the ingot.
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申请公布号 |
US7611580(B2) |
申请公布日期 |
2009.11.03 |
申请号 |
US20070753722 |
申请日期 |
2007.05.25 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
LU ZHENG |
分类号 |
C30B35/00 |
主分类号 |
C30B35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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