发明名称 Controlling melt-solid interface shape of a growing silicon crystal using a variable magnetic field
摘要 System for controlling crystal growth in a Czochralski crystal growing apparatus. A magnetic field is applied within the crystal growing apparatus and varied to control a shape of the melt-solid interface where the ingot is being pulled from the melt. The shape of the melt-solid interface is formed to a desired shape in response to the varied magnetic field as a function of a length of the ingot.
申请公布号 US7611580(B2) 申请公布日期 2009.11.03
申请号 US20070753722 申请日期 2007.05.25
申请人 MEMC ELECTRONIC MATERIALS, INC. 发明人 LU ZHENG
分类号 C30B35/00 主分类号 C30B35/00
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