| 发明名称 |
Method and system for patterning of magnetic thin films using gaseous transformation to transform a magnetic portion to a non-magnetic portion |
| 摘要 |
A method (and resulting structure) of patterning a magnetic thin film, includes using a chemical transformation of a portion of the magnetic thin film to transform the portion to be non-magnetic and electrically insulating.
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| 申请公布号 |
US7611911(B2) |
申请公布日期 |
2009.11.03 |
| 申请号 |
US20030680260 |
申请日期 |
2003.10.08 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ABRAHAM DAVID WILLIAM;O'SULLIVAN EUGENE JOHN |
| 分类号 |
H01L21/00;H01L21/314;C23F4/00;G11B5/31;G11B5/39;G11B5/64;H01F10/32;H01F41/34;H01L21/8246;H01L27/105;H01L43/08;H01L43/12 |
主分类号 |
H01L21/00 |
| 代理机构 |
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