| 摘要 |
<p>A substrate transfer apparatus is provided with a moving stage (32), which is movably arranged in a horizontal direction on a base (14) and positioned on one side for receiving and transferring a substrate (G) on the one side; a supporting apparatus (S), which is arranged on the moving stage (32) with a supporting area, for movably supporting the substrate (G) in the horizontal direction; a moving apparatus (T), which traverses the leading end of the supporting area on the one side and transfers the substrate (G) on the supporting area in the horizontal direction so as to receive and transfer the substrate (G) on the one side; a column (16) standing on the base (14); and a hand (H), which is attached to the column (16) to be movable in the horizontal direction and liftable in the vertical direction by traversing the supporting area, so as to transfer the substrate (G) on the opposite side and transfer the transferring substrate (G) onto the supporting apparatus (S). The supporting area has an extending section protruded to the one side from the moving stage (32).</p> |
