SUBSTRATE PROCESSING APPARATUS AND METHOD OF CLEANING FOR THE SAME,申请号KR20080014000-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND METHOD OF CLEANING FOR THE SAME
摘要
申请公布号	KR100924654(B1)	申请公布日期	2009.11.03
申请号	KR20080014000	申请日期	2008.02.15
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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