PLASMA PROCESSING APPARATUS AND ELECTRODE USED THEREIN,申请号KR20080109266-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS AND ELECTRODE USED THEREIN
摘要
申请公布号	KR100924851(B1)	申请公布日期	2009.11.02
申请号	KR20080109266	申请日期	2008.11.05
申请人		发明人
分类号	H05H1/34;H01L21/205;H01L21/3065;H05H1/24	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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