SWITCHING MEANS HAVING CNT EMITTER OF A-SE IMAGE SENSOR AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: A switching means having CNT emitter of a-se image sensor and manufacturing method of the same are provided to improve the uniformity of the switching means and to supply stable current. CONSTITUTION: The first gate electrode is formed in the upper part of the glass substrates(100). The first insulation layer(120) is formed in the upper part of the first gate electrode(110). The amorphous silicon layer(130) is formed in the upper part of the first insulation layer. The source electrode and drain electrode are formed by injecting the p-type or the n-type dopant into both sides of the amorphous silicon layer. The metal layer(160) is applied on the source electrode and the upper part of drain electrode. The carbon nanotube emitter(170) is formed in the upper part of drain electrode.