发明名称 COMPOSITE SEED LAYER, MAGNETIC REPRODUCTION HEAD PROVIDED WITH IT, AND FORMING METHOD OF TMR SENSOR AND CCP-CPP-GMR SENSOR
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a magnetic reproduction head capable of obtaining a high resolution and a high signal-to-noise ratio. <P>SOLUTION: A reproduction head 1 is a TMR sensor, for which an MTJ element 16 is disposed in between a lower shielding layer 2 and an upper shield layer 18. The MTJ element 16 is provided on the lower shield layer 2 through the composite seed layer 15. As for the composite seed layer 15, a soft magnetic layer 3, an amorphous layer 4, a soft magnetic layer 5, and a buffer layer 6 are laminated in this order starting from the side of the lower shielding layer 2. Thus, the crystal structure of the MTJ element 16 becomes superior one in smoothness and homogeneity. Of the composite seed layer 15, the soft magnetic layer 3, the amorphous layer 4 and the soft magnetic layer 5 form an effective shield structure 14, together with the lower shielding layer 2. Thus, an effective shield for shielding distance is reduced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009252342(A) 申请公布日期 2009.10.29
申请号 JP20090086182 申请日期 2009.03.31
申请人 HEADWAY TECHNOLOGIES INC 发明人 ZHANG KUNLIANG;ZHAO TONG;WANG HUI-CHUAN;LI MIN
分类号 G11B5/39;G01R33/09;H01F10/32;H01L43/08;H01L43/10;H01L43/12 主分类号 G11B5/39
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