| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of accurately correcting the imbalance of a rotary body by a simple constitution. Ž<P>SOLUTION: This turbo molecular pump has a rotor 1 having a plurality of rotary blades 11, 21 and 31, a rotary shaft 2 fixed with the rotor 1, a plurality of fixed blades 41, 51 and 61 arranged so as to oppose the plurality of rotary blades 11, 21 and 31, a casing 3 for supporting the plurality of fixed blades 41, 51 and 61, an intake port 6 and an exhaust port 7 of gas, a fixing bolt 100 concentrically arranged with the rotary shaft 2 and fixing the rotor 1 to the rotary shaft 2, and at least one first weight 103 detachably installed on the fixing bolt 100. A plurality of first screw holes 102 are formed at equal intervals around the axis of the rotary shaft 2 in a head of the fixing bolt 100, and the first weight 103 is engaged with the first screw hole 102 so as to be threaded. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
