发明名称 Method for growing carbon nanotubes, and electronic device having structure of ohmic connection to carbon element cylindrical structure body and production method thereof
摘要 An electronic device having a structure of an ohmic connection to a carbon element cylindrical structure body, wherein a metal material is positioned inside the junction part of a carbon element cylindrical structure body joined to a connection objective and the carbon element cylindrical structure body and the connection objective are connected by an ohmic contact. Methods for producing such an electronic device are also disclosed. Further, a method for growing a carbon nanotube is disclosed.
申请公布号 US2009269921(A1) 申请公布日期 2009.10.29
申请号 US20090458308 申请日期 2009.07.08
申请人 FUJITSU LIMITED 发明人 KAWABATA AKIO;NIHEI MIZUHISA
分类号 H01L21/285;C23C16/26;H01L21/768;H05K3/40 主分类号 H01L21/285
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