| 摘要 |
<p>A capacitive pressure sensor (1) comprises an electrically conductive back plate (3) and a plurality of electrically conductive diaphragms (2) each being deflectable by a varying pressure, particularly a sound pressure (6). The plurality of diaphragms (2) are electrically interconnected, wherein the plurality of diaphragms (2) forms a first plate electrode of a plate capacitor (C) and the back plate (3) forms a second plate electrode of said capacitor (C). The plurality of diaphragms (2) are spaced from the back plate (3) forming a common back volume (5) in between.</p> |
