| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a distance measuring apparatus in which a probe part resists damage and is easy to be replaced. Ž<P>SOLUTION: Light from a light source 2 is made to be a parallel light beam by a collimator lens 3 and is irradiated nearly perpendicularly on the inner wall of a hole 1 from an exit face 14. The scattered light is received by a micro aperture 15, is reflected by mirrors 17, 18 repeatedly, and is guided to a light receiving lens 4 to be received. The light received by the light receiving lens is imaged on a linear sensor 5. If a light receiving position on the linear sensor 5 is determined, the incident angle of the scattered light incident on the micro aperture 15 is determined, thereby allowing the distance from the exit face 14 to the inner wall of the hole 1 to be calculated on the basis of the principle of triangular surveying. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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