ULTRASONIC SENSOR AND ULTRASONIC SENSOR ARRAY, AND ULTRASONIC DETECTION DEVICE EQUIPPED THEREWITH

摘要

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic sensor and an ultrasonic sensor array simultaneously achieving higher sensitivity and wider band and facilitating formation of an array by ensuring both mechanical and optical sensitivities, and to provide an ultrasonic detection device with these sensor and sensor array. Ž<P>SOLUTION: The ultrasonic sensor includes an ultrasonic receiving section disposed on a substrate and including a movable part displacing with ultrasonic waves and a resonator configured by disposing a first reflection film provided on the ultrasonic receiving section and a second reflection film held on the substrate in opposition via a non-solid medium. Ultrasonic-wave-induced displacement of the movable part is detected based on an optical response based on a change in relative distance between the first and second reflection films based on the displacement of the movable part. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž