| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a joining method capable of strongly and efficiently joining the two materials to each other at high dimension accuracy, a joint body manufactured using the joining method, a liquid droplet delivery head, and a liquid droplet delivery apparatus. <P>SOLUTION: The joining method includes: a first step of substituting a first gas with a second gas containing an inert gas as a main component after a mixture gas (first gas) of a material gas and a carrier gas is made plasmatic under a reduced pressure atmosphere and forming a plasma polymerization film 31 having an adhesion property with the other body to be deposited on a first material 21 by making the second gas plasmatic to obtain a first body 41 to be deposited; and a second step of preparing a second body 42 to be deposited in which the plasma polymerization film 32 similar to the plasma polymerization film 31 is formed on a surface of the second material 22 and pressure-contacting and joining the first body 41 to be deposited and the second body 42 to be deposited such that the respective plasma polymerization films 31, 32 are closely adhered while maintaining a pressure of a reduced pressure atmosphere to less than an atmospheric pressure to obtain the joint body 1. <P>COPYRIGHT: (C)2010,JPO&INPIT |
