发明名称 |
PLASMA GENERATING DEVICE AND FILM DEPOSITION METHOD IN WHICH THE PLASMA GENERATING DEVICE IS USED |
摘要 |
Problem: To generate long plasma easily at low cost and to perform a plurality of film deposition methods using a single plasma generating device. Means for Solving the Problem A plasma generating device is provided with, in the vacuum inside thereof, a cylindrical electrode comprising an opening in a part thereof and generating plasma therein when gas is introduced thereinto and a direct-current negative voltage is applied thereto.
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申请公布号 |
US2009266703(A1) |
申请公布日期 |
2009.10.29 |
申请号 |
US20060997697 |
申请日期 |
2006.07.31 |
申请人 |
JIANG NAN;WANG HONG-XING;HIRAKI AKIO;HABA MASANORI |
发明人 |
JIANG NAN;WANG HONG-XING;HIRAKI AKIO;HABA MASANORI |
分类号 |
C23C14/34;C23C14/56 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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