发明名称 SENSOR CHIP AND GAS SENSOR
摘要 <p><P>PROBLEM TO BE SOLVED: To allow one to compensate influences in output fluctuations of a semiconductor laser and changes in environment such as ambient temperature with a relatively simple construction. <P>SOLUTION: A reaction film 12 which reacts with ammonia gas and is formed on a part of an optical waveguide layer 11. An optical waveguide for detection light, having a part in which, the reaction film 12 on the optical waveguide layer 11 is formed, as an optical waveguide path is constructed. Also, an optical waveguide for reference light having a part in which the reaction film on the optical waveguide layer 11 is not formed, as an optical waveguide path is constituted. Branched laser light beams are projected into the optical waveguide for detection light and the optical waveguide for reference light respectively by a right-angle prism 13, and guided waves from the optical waveguide for detection light and the optical waveguide for reference light are extracted respectively by a right-angle prism 14 to detect the guided waves by a first and a second photodiode 8, 9. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2009250858(A) 申请公布日期 2009.10.29
申请号 JP20080101125 申请日期 2008.04.09
申请人 SONAC KK 发明人 YO MANKICHI;FUJIKAWA KAZUKO;KINOSHITA MASAHARU
分类号 G01N21/27;G01N21/77 主分类号 G01N21/27
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