OPTICAL CONNECTION STRUCTURE AND METHOD FOR FABRICATING THE SAME

摘要

PURPOSE: An optical wiring structure manufacturing an optical wiring structure and a manufacturing method thereof which is condensed as a micro lens are provided to omit a mounting process of the lens by forming the optical wiring structure condensed as the micro lens. CONSTITUTION: A circular mask pattern is formed on a silicon substrate(10). A lens forming groove is formed by etching the silicon substrate. A silica layer(30) of several micrometers is formed on the silicon substrate by using an oxidative method, a chemical vapor deposition, a sputtering method and flame hydrolysis method. A bottom cladding layer(40), a core layer(50) and a top cladding layer(60) are successively laminated on the whole upper side of the silica layer. A via hole is formed in the lower part of the silicon substrate.