| 摘要 |
<P>PROBLEM TO BE SOLVED: To propose an electrostatic actuator preventing the occurrence of variations in flatness of each insulating film corresponding to a plurality of oscillating boards while assuring the anode joining strength between a silicon substrate and a glass substrate. Ž<P>SOLUTION: This method comprises a step of forming the first insulating film 8a formed of a dielectric material with a dielectric constant higher than that of a silicon oxide in the silicone substrate 2, a step of eliminating the first insulating film 8a from a part where the silicone substrate 2 is closely contacted with the glass substrate 3 by patterning of the first insulating film 8a, a step of forming the second insulating film 8b with more favorable anode joining performance compared to the first insulating film 8a until its thickness comes to cover the first insulating film 8a in the surface of the silicone substrate 2 where the first insulating film 8a is patterned, a step of polishing the surface of the silicone substrate 2 with the second insulating film 8b flatly until the first insulating film 8a is exposed, and a step of anode-joining the second insulating film surface 8b of the silicone substrate 2 and the glass substrate 3 by making the first insulating film 8a correspond to an individual electrode 5. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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