| 摘要 |
PROBLEM TO BE SOLVED: To minutely vibrate an object to be held through a pneumatic control. SOLUTION: A vibration removing system 200 detects a vibration of a vibration removing table 202 by an acceleration detector 204, controls a pneumatic pressure according to the detected acceleration in a controller section 206, supplies the controlled pneumatic pressure to a minute vibration controller 200, and offsets and removes the minute vibration of the vibration removing table 202 via a mounting part 210 by a minute vibration controller 200. In the controller 200, a plurality of flat moving members are aligned in a housing, and a gas for controlling the clearance is supplied in a clearance between the moving members. Each flat moving member has a gas throttle section where a gas bearing rigidity characteristic regarding a variation amount of clearance of each moving member against a variation of a pneumatic pressure, has a sign in a positive direction, and is set at a predetermined threshold rigidity value or below. COPYRIGHT: (C)2010,JPO&INPIT |
