APPARATUS AND METHOD FOR SURFACE ANALYSIS

摘要

PROBLEM TO BE SOLVED: To provide a surface analysis apparatus capable of highly accurately analyzing the surface of a sample in a short time through the use of multi-charged ions. SOLUTION: The surface analysis apparatus 1 includes: a sample base 6 for mounting a sample 5; a multi-charged ion generating source 3 for irradiating the sample 5 mounted to the sample base 6 with a multi-charged ion beam 4 having a valency number of 15 or greater; a mass analysis part 8 for detecting secondary ions 7 generated by the irradiation of the multi-charged ion beam 4 to the sample 5; a secondary electron detection part 10 for detecting secondary electrons 9 generated by the irradiation of the sample 5 with the multi-charged ion beam 4; and a mass analysis control part 12 for receiving a detection signal of secondary electrons from the secondary electron detection part 10, generating an analysis start signal, and transmitting it to the mass analysis part. COPYRIGHT: (C)2010,JPO&INPIT