| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve problems that a deposition method using deposition masks having minute patterns causes easy clogging of the minute patterns with deposition particles, reduction in the dimensional reproducibility of the masks, and generation of mask alignment errors a little of which causes product failures since deposition masks having minute patterns require high alignment accuracy. <P>SOLUTION: Depositing is performed while moving a deposition mask 200a to correct a dimensional fluctuation due to adhesion of a deposit. Therefore, the dimensional accuracy can be kept independently of the adhesion of deposit on the deposition mask 200a. When a negative electrode 215 and the opening of the deposition mask 200a partially overlap with each other for deposition, a little alignment error may cause only a little color balance change. Since a color balance is a characteristic to be easily controlled, this invention can provide an organic EL panel manufacturing method of high yield ratios. <P>COPYRIGHT: (C)2010,JPO&INPIT |
